Composition distribution and magnetic characteristics of sputtered Permalloy films with substrate angle

Journal Article · Mon May 01 04:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.576292· OSTI ID:6064590

Nakagawa, Y; Ohshita, Y; Narishige, S; Setoyama, E

Permalloy sputtered films for a thin magnetic head are deposited under precisely controlled conditions. The head pattern on a substrate shows not only a flat portion but also an inclined portion. The film characteristics on the inclined portions are important for a good thin-film head. Using a rf magnetron sputtering device with an 8-in. target, the angular distributions of sputtered Permalloy atoms (Ni and Fe), composition profile, and the magnetic characteristics were investigated. The results showed that the angular distributions of the Ni--Fe atoms depended on the rf power and were different from those of the cosine rule. A comparison of the film characteristics between the flat and inclined portions was carried out using a special substrate holder, in which nine glass substrates were fixed. The film thickness of the inclined portion differed, depending on the positions where the substrates were fixed. The coercive forces decreased with decreasing sputtering gas pressures, and those of thin films deposited on the inclined substrates were 20--50 A/m.

• Research Organization: Hitachi Research Laboratory, Hitachi, Ltd., Hitachi-shi, Ibaraki-ken 319-12, Japan
• OSTI ID: 6064590
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

656002* -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
ANGULAR DISTRIBUTION
DATA
DEPOSITION
DISTRIBUTION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
ENERGY BEAM DEPOSITION
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
IRON
IRON ALLOYS
MAGNETIC STORAGE DEVICES
MAGNETRONS
MEMORY DEVICES
METALS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NICKEL
NICKEL ALLOYS
NUMERICAL DATA
PERMALLOY
RF SYSTEMS
SPUTTERING
SURFACE COATING
TRANSITION ELEMENTS