Effects of surface microroughness in ellipsometry

Conference · Sun Dec 01 04:00:00 EST 1985

OSTI ID:6059605

Church, E L; Zavada, J M

We calculate the effects of surface roughness on the ellipsometric angles using plans-wave Rayleigh-Rice vector scattering theory. In the perturbation limit - RMS roughness height << incident wavelength - these effects can be written in terms of weighted intergals over the power spectral density of the surface roughness. We present results in this limit for surfaces with arbitrary optical index and arbitrary two-dimensional roughness distributions, and then illustrate and assess them by considering four distinct limits: (1) Deterministic roughness in the form of periodic corrugations. (2) Statistical roughness with large transverse correlation lengths relative to the incident wavelength. (3) Statistical roughness with small transverse correlation lenghts. (4) Highly reflecting surface materials. 10 refs.

• Research Organization: Army Armament Research and Development Command, Dover, NJ (USA)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 6059605
• Report Number(s): BNL-37051; CONF-761041-3; CONF-750993-4; ON: DE86008014
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular &amp; Chemical Physics-- Beams &amp; their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
COHERENT SCATTERING
ELECTROMAGNETIC RADIATION
ELLIPSOMETRY
MATHEMATICAL MODELS
MEASURING METHODS
POLARIZATION
RADIATIONS
RAYLEIGH SCATTERING
REFLECTION
ROUGHNESS
SCATTERING
SURFACE PROPERTIES
VISIBLE RADIATION