Interpretation of glancing-incidence scattering measurements

Conference · Sat Mar 01 04:00:00 EST 1986

OSTI ID:5443038

Church, E L; Takacs, P Z

The practical testing and specification of x-ray and uv mirrors requires a scattering theory to link topographic finish errors and functional performance. This paper examines various smooth-surface theories that have been proposed for this purpose, with particular attention to their behavior near the critical angle where the surface reflectivity is a rapid function of angle. Of the various diffraction theories considered, Rayleigh-Rice vector perturbation theory is the most realistic; and predicts scattering distributions that are characteristically different from those of the canonical model. In some cases these differences or anomalies are similar to those observed by Yoneda and by Matsushita et al., which have previously been interpreted using geometrical-optics models. But there are differences. For example, the Rayleigh-Rice theory predicts anomalous scattering near the critical angle above the glancing angle of incidence (''anti-Yoneda effect''). Results are illustrated by calculations for strawman scattering experiments.

• Research Organization: Army Research and Development Command, Dover, NJ (USA); Brookhaven National Lab., Upton, NY (USA)
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 5443038
• Report Number(s): BNL-38386; CONF-860366-11; ON: DE86014177
• Country of Publication: United States
• Language: English

Related Subjects

657005* -- Theoretical Physics-- Optics
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
MIRRORS
PERTURBATION THEORY
RADIATIONS
REFLECTION
SCATTERING
SURFACE PROPERTIES
ULTRAVIOLET RADIATION
X RADIATION