Characterization of Nb/AlO/sub x-/Al/Nb junction structures by anodization spectroscopy

Conference · Tue Feb 28 23:00:00 EST 1989 · IEEE Trans. Magn.; (United States)

OSTI ID:6044393

Imamura, T; Hasuo, S

The thin tunneling barrier in Nb/AlOx-Al/Nb Josephson junction was characterized by anodization spectroscopy. The authors' studies focus on Nb/AlOx and Al/Nb interfaces in Nb/AlOx-Al/Nb structures made by varying certain process parameters. The interface quality is greatly affected by film thickness, layer sequence, annealing, and existence of a thin oxide. Anodization spectroscopy is a useful technique to diagnose the tunneling barrier in the Nb/AlOx-Al/Nb Josephson junctions during fabrication processes.

• Research Organization: Fujitsu Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01 (JP)
• OSTI ID: 6044393
• Report Number(s): CONF-880812-
• Journal Information: IEEE Trans. Magn.; (United States), Journal Name: IEEE Trans. Magn.; (United States) Vol. 25:2; ISSN IEMGA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
DESIGN
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FABRICATION
FILMS
INTERFACES
JOSEPHSON JUNCTIONS
JUNCTIONS
NIOBIUM COMPOUNDS
NIOBIUM OXIDES
OXIDES
OXYGEN COMPOUNDS
PARAMETRIC ANALYSIS
PHYSICAL PROPERTIES
REFRACTORY METAL COMPOUNDS
SPECTROSCOPY
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
THICKNESS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TUNNELING