YBCO superconducting thin films prepared by vacuum coevaporation without post treatment in oxygen
Results on low temperature process in preparation of superconducting thin films YBa/sub 2/Cu/sub 3/O/sub x/ are presented. The YBCO thin films of thickness 0.5-1.0 ..mu..m were prepared by vacuum codeposition of Y, BaO, and Cu not only onto both polycrystalline and single crystal Al/sub 2/O/sub 3/, MgO, and SrTiO/sub 3/ but even on Si+SrTiO/sub 3/ and Si+SiO/sub 2/ substrates. The temperature of substrate was 550 - 580/sup 0/C and partial oxygen pressure in vacuum chamber 10/sup -2/ Pa. The total film growth rate was 1 nm/s with controlled individual rates to yield the desired 1:2:3 composition. The preparation of in situ superconducting thin films was successful with all used substrates. Maximum critical temperature at zero resistance was T/sub ce/ = 85 K, the onset critical temperature T/sub con/ being from 90 to 95 K.
- Research Organization:
- Institute of Electrical Engineering of Electro-Physical Research Centre, Slovak Acad. Sci., 842 39 Bratislava (CS)
- OSTI ID:
- 6042561
- Report Number(s):
- CONF-880812-
- Journal Information:
- IEEE Trans. Magn.; (United States), Journal Name: IEEE Trans. Magn.; (United States) Vol. 25:2; ISSN IEMGA
- Country of Publication:
- United States
- Language:
- English
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71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
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BARIUM COMPOUNDS
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CHALCOGENIDES
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CRITICAL TEMPERATURE
CRYSTAL STRUCTURE
CRYSTALS
ELECTRIC CONDUCTIVITY
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EVAPORATION
FABRICATION
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LOW TEMPERATURE
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OXIDATION
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
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SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
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