Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Studies of boron implantation through photochemically deposited SiO/sub 2/ films on Hg/sub 1-x/Cd/sub x/Te. Technical report

Technical Report ·
OSTI ID:6039186
Variable-temperature Hall and resistivity measurements were used to monitor the changes in carrier behavior in p-type Hg(1-x)Cd(x)Te when boron ions are implanted through photochemically deposited SiO/sub 2/. The formation of an n-type layer is demonstrated. Quantitative and nondestructive determination of the absolute /sup 10/B concentration and distribution were obtained by the novel method of neutron-depth profiling. As expected, the boron distributions in the SiO/sub 2/ films and Hg(1-x)Cd(x)Te are strongly dependent upon the ion implant energy. However, negligible changes in the boron depth profiles were found after 200 C anneals. The present results are briefly related to the performance behavior of mid-wavelength infrared (MWIR) sensors produced via generic ion-implantation procedures.
Research Organization:
Aerospace Corp., El Segundo, CA (USA). Chemistry and Physics Lab.
OSTI ID:
6039186
Report Number(s):
AD-A-182437/4/XAB; TR-0086(6945-07)-3
Country of Publication:
United States
Language:
English