Masks for high aspect ratio x-ray lithography
- Lawrence Berkeley National Lab., CA (United States)
- Sandia National Labs., Albuquerque, NM (United States)
Fabrication of very high aspect ratio microstructures, as well as ultra-high precision manufacturing is of increasing interest in a multitude of applications. Fields as diverse as micromechanics, robotics, integrated optics, and sensors benefit from this technology. The scale-length of this spatial regime is between what can be achieved using classical machine tool operations and that which is used in microelectronics. This requires new manufacturing techniques, such as the LIGA process, which combines x-ray lithography, electroforming, and plastic molding.
- Research Organization:
- Lawrence Berkeley Lab., CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 603703
- Report Number(s):
- LBNL--39981; ON: DE97007345
- Country of Publication:
- United States
- Language:
- English
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