Reactive sticking coefficients of silane on silicon
Conference
·
OSTI ID:6014713
We have investigated the reaction of room-temperature silane and disilane on a hot polycrystalline silicon surface using both a collision-free molecular beam and a very low pressure CVD cell. Reactive sticking coefficients were obtained from deposition rate data over a wide range of temperatures and silane (disilane) fluxes. The RSCs are substantially less than one, ranging from 6 x 10/sup -5/ to 4 x 10/sup -2/. For silane we observed curved Arrhenius plots with slopes decreasing from approx.60 kcal mol/sup -1/ at low temperatures to approx.2 kcal mol/sup -1/ at higher temperatures. The RSCs are independent of flux (pressure) at 1040/sup 0/C, but vary as flux to the approx.-1/2 power at 710/sup 0/C. A model comprised of a dissociative adsorption mechanism with competing associative desorption and reaction was found to give reasonable agreement. For disilane, we observed RSCs that were roughly ten times higher than those for silane. We also observed a curved Arrhenius plot and a flux dependence at 710/sup 0/C for disilane. 22 refs., 5 figs.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6014713
- Report Number(s):
- SAND-87-2321C; CONF-871125-6; ON: DE88000601
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
ADSORPTION
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
COLLISIONS
CRYSTALS
DECOMPOSITION
DEPOSITION
DESORPTION
DISSOCIATION
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
MOLECULE COLLISIONS
MOLECULES
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
POLYCRYSTALS
PRESSURE DEPENDENCE
REACTION KINETICS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SORPTION
SURFACE COATING
TEMPERATURE DEPENDENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
ADSORPTION
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
COLLISIONS
CRYSTALS
DECOMPOSITION
DEPOSITION
DESORPTION
DISSOCIATION
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
MOLECULE COLLISIONS
MOLECULES
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
POLYCRYSTALS
PRESSURE DEPENDENCE
REACTION KINETICS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SORPTION
SURFACE COATING
TEMPERATURE DEPENDENCE