Gold transmission gratings with submicrometer periods and thicknesses >0. 5. mu. m
Journal Article
·
· J. Vac. Sci. Technol.; (United States)
Gold gratings with spatial periods of 0.3 and 0.2 ..mu..m have been fabricated in thicknesses of 0.6 and 0.25 ..mu..m, respectively, and used in x-ray spectroscopy and spatial-period-division. Fabrication techniques included: holographic lithography, shadowing, x-ray lithography, and gold microplating. Control of linewidth to tolerance of the order of 10 nm has been demonstrated for gratings of 0.2 ..mu..m period. A high resolution imaging spectrometer, composed of a 22 x Wolter x-ray microscope in conjunction with a gold transmission grating, was tested. At a wavelength of 0.69 nm, a resolving power, lambda/..delta..lambda, of 200 was demonstrated. Resolution in this case was source-size limited. Gratings of 99.5 nm period were exposed in PMMA by x-ray (lambda = 4.5 nm) spatial-period-division.
- Research Organization:
- Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
- OSTI ID:
- 6002554
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 19:4; ISSN JVSTA
- Country of Publication:
- United States
- Language:
- English
Similar Records
Gold transmission gratings with submicrometer periods and thickness > 0. 5. mu. m
(Diffraction gratings used in x-ray spectroscopy): Final report
Space and time resolved soft x-ray spectra using x-ray transmission gratings
Conference
·
Mon Nov 30 23:00:00 EST 1981
·
OSTI ID:5307674
(Diffraction gratings used in x-ray spectroscopy): Final report
Technical Report
·
Mon Oct 31 23:00:00 EST 1988
·
OSTI ID:6259401
Space and time resolved soft x-ray spectra using x-ray transmission gratings
Conference
·
Wed Dec 31 23:00:00 EST 1980
· Proc. Soc. Photo-Opt. Instrum. Eng.; (United States)
·
OSTI ID:6381119