Gold transmission gratings with submicrometer periods and thickness > 0. 5. mu. m
Conference
·
OSTI ID:5307674
Gold gratings with spatial periods of 0.3 and 0.2 ..mu..m have been fabricated in thicknesses of 0.6 and 0.25 ..mu..m, respectively, and used in x-ray spectroscopy and spatial-period-division. Fabrication techniques included: holographic lithography, shadowing, x-ray lithography and gold microplating. Control of linewidth to tolerances of the order of 10 nm has been demonstrated for gratings of 0.2 ..mu..m period. A high resolution imaging spectrometer, composed of a 22x Wolter x-ray microscope in conjunction with a gold transmission grating, was tested. At a wavelength of 0.69 nm a resolving power, lambda/..delta.. lambda, of 200 was demonstrated. Resolution in this case was source size limited. Gratings of 99.5 nm period were exposed in PMMA by x-ray (lambda = 4.5 nm) spatial-period-division.
- Research Organization:
- Lawrence Livermore National Lab., CA (USA); Massachusetts Inst. of Tech., Cambridge (USA)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 5307674
- Report Number(s):
- UCRL-87025; CONF-8105103-2; ON: DE82010065
- Country of Publication:
- United States
- Language:
- English
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