Infrared multiphoton decomposition of monosilane sensitized by silicon tetrafluoride

Journal Article · Wed Jan 19 23:00:00 EST 1983 · J. Phys. Chem.; (United States)

DOI:https://doi.org/10.1021/j100225a038· OSTI ID:6000506

Longeway, P A; Lampe, F W

The decomposition of SiH/sub 4/ sensitized by the multiphoton absorption of unfocussed infrared laser radiation by SiF/sub 4/, has been studied at a fluence of 0.31 J/cm/sup 2/ and over a total pressure range of 3-16 torr. In contrast to the direct infrared multiphoton induced decomposition, the only volatile products observed are H/sub 2/ and Si/sub 2/H/sub 6/ which, within experimental error, are formed in equal amounts, It is proposed that collisional energy transfer from vibrationally excited SiF/sub 4/ produces internally excited SiH/sub 4/ to form Si/sub 2/H/sub 6/. The absence of Si/sub 3/H/sub 8/ and higher silanes in the volatile products, which is characteristic of other silane decomposition studies, is attributed to the absence of SiH/sub 3/ radicals and the fact that the SiH/sub 4/ molecules attacked by SiH/sub 2/ contain only that excess vibrational energy characteristic of thermal equilibrium at 300 K.

• Research Organization: The Pennsylvania State Univ., University Park
• DOE Contract Number: AC02-76ER03416
• OSTI ID: 6000506
• Journal Information: J. Phys. Chem.; (United States), Journal Name: J. Phys. Chem.; (United States) Vol. 87:2; ISSN JPCHA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400301* -- Organic Chemistry-- Chemical & Physicochemical Properties-- (-1987)
ABSORPTION
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
DATA
DECOMPOSITION
ELECTROMAGNETIC RADIATION
ENERGY ABSORPTION
EXPERIMENTAL DATA
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
INFRARED RADIATION
KINETICS
NUMERICAL DATA
RADIATIONS
REACTION KINETICS
SILANES
SILICON COMPOUNDS
SILICON FLUORIDES