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Properties of a new molybdenum nitrogen phase

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.571921· OSTI ID:5999877
A new Mo--N phase has been prepared by rf reactive sputtering. The structure, as determined by x-ray analyses matches well with the hexagonal Mo/sub 2/C structure. The films were produced by reactively sputtering Mo in a gaseous N/sub 2/ atmosphere in an attempt to prepare thin films of the predicted high T/sub c/ superconductor MoN in the B1 phase. By further nitriding these Mo/sub 2/N films with NH/sub 3/ at 780 /sup 0/C for 24 h, they appeared more stoichiometric as determined by their superconducting properties. These films are superconducting T/sub c/ roughly-equal7 K and have high critical magnetic fields H/sub c/2(0) roughly-equal7.5 T. Varying both the temperature of the substrate between 500 and 900 /sup 0/C, and the power density did not effect the phase of the Mo--N compound.
Research Organization:
Naval Research Laboratory, Washington, DC 20375
OSTI ID:
5999877
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 1:2; ISSN JVTAD
Country of Publication:
United States
Language:
English

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