Deposition and characterization of Li[sub 2]O-SiO[sub 2]-P[sub 2]O[sub 5] thin films

Journal Article · Thu Apr 01 04:00:00 EST 1993 · Journal of the American Ceramic Society; (United States)

DOI:https://doi.org/10.1111/j.1151-2916.1993.tb05317.x· OSTI ID:5992714

Bates, J B; Dudney, N J; Luck, C F; Sales, B C; Zuhr, R A ^[1]; Robertson, J D ^[2]

---

1. Oak Ridge National Lab., Oak Ridge, TN (United States)
2. Univ. of Kentucky, Lexington, KY (United States). Dept. of Chemistry

Amorphous lithium electrolyte thin films, xLi[sub 2]O[center dot]ySiO[sub 2][center dot]zP[sub 2]O[sub 5], were deposited by rf magnetron sputtering of pure and mixed-phase lithium silicate, lithium phosphate, SiO[sub 2], Li[sub 2]O, and Li[sub 2]CO[sub 3] targets, and their compositions were determined using proton-induced [gamma]-ray emission spectroscopy, energy-dispersive X-ray analysis, Rutherford backscattering spectrometry, and atomic-emission spectroscopy. The deposition conditions were chosen to assure thermalization of the sputtered flux, which proved to be necessary in order to obtain a homogeneous distribution of Si and P in the films. Optical absorption and ac impedance measurements showed that glass-in-glass phase separation occurred in a large SiO[sub 2]-rich domain of the composition diagram. In contrast to bulk glasses, all of the Li[sub 2]O-SiO[sub 2] films were phase-separated, including those with lithia contents larger than lithium disilicate. High-performance liquid chromatography measurements revealed that, analogous to bulk glasses, the addition of SiO[sub 2] to Li[sub 2]O-P[sub 2]O[sub 5] compositions reduced the number of phosphate anion dimers, trimers, and higher anion polymers in the films through the formation of -Si-O-P- bonds. However, in contrast to bulk glasses, the distribution of phosphate anion polymers followed closely the Flory distribution, with the fraction of anion polymers decreasing monotonically with increasing chain length.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5992714
• Journal Information: Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 76:4; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
360606 -- Other Materials-- Physical Properties-- (1992-)
ALKALI METAL COMPOUNDS
AMORPHOUS STATE
CHALCOGENIDES
CHROMATOGRAPHY
COATINGS
DATA
DIFFRACTOMETERS
DISTRIBUTION
ELASTIC SCATTERING
ELECTRIC IMPEDANCE
ELEMENTS
EMISSION SPECTROSCOPY
EXPERIMENTAL DATA
FILMS
GAMMA SPECTROSCOPY
GLASS
IMPEDANCE
INFORMATION
LIQUID COLUMN CHROMATOGRAPHY
LITHIUM COMPOUNDS
LITHIUM OXIDES
LITHIUM PHOSPHATES
LITHIUM SILICATES
MEASURING INSTRUMENTS
NONMETALS
NUMERICAL DATA
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHOSPHATES
PHOSPHORUS
PHOSPHORUS COMPOUNDS
PHOSPHORUS OXIDES
PHYSICAL PROPERTIES
POLYMERS
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SEPARATION PROCESSES
SILICATES
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SPATIAL DISTRIBUTION
SPECTROSCOPY
SPUTTERING
THIN FILMS
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTOMETERS