Thin polycrystalline films of indium phosphide on low-cost substrates. Final report, September 30, 1976-March 31, 1978

Technical Report · Sat Apr 01 04:00:00 EST 1978

OSTI ID:5990099

Ruth, R P; Dapkus, P D; Manasevit, H M; Campbell, A G; Hess, K L; Johnson, R E; Moudy, L A; Yang, J J.J.

A program for development of the metal-organic chemical vapor deposition (MO-CVD) process for making thin-film polycrystalline indium phosphide solar cells on inexpensive substrates is described. A new reactor system was designed and constructed and its performance characterized. The triethylindium-PH/sub 3/ reaction chemistry was investigated and characterized experimentally, and reactor design and deposition parameters were adjusted to achieve InP deposition rates up to 12 microns/h. Deposition parameters were established for growth of high-quality epitaxial undoped (n-type) InP films on single-crystal substrates of GaAs and InP. Deposition parameters were established for growing epitaxial p-type InP films on single crystal GaAs and InP substrates of several orientations by doping with diethylzinc during growth. Several potentially low-cost substrate materials (glasses, metal sheet, films of metals and semiconductors on glasses) were identified and used for growth of polycrystalline InP.

• Research Organization: Rockwell International Corp., Anaheim, CA (USA). Eleectronics Research Center
• DOE Contract Number: AC04-76ET20256
• OSTI ID: 5990099
• Report Number(s): DOE/ET/20256-T1; ALO-3727-6; ON: DE82002100
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL DOPING
CRYSTAL GROWTH
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
EPITAXY
EQUIPMENT
ETCHING
FILMS
GLASS
GRAIN BOUNDARIES
HETEROJUNCTIONS
IMPLANTS
INDIUM COMPOUNDS
INDIUM PHOSPHIDE SOLAR CELLS
INDIUM PHOSPHIDES
JUNCTIONS
METALS
MICROSTRUCTURE
MOLYBDENUM
PERFORMANCE
PHOSPHIDES
PHOSPHINES
PHOSPHORUS COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
POLYCRYSTALS
REFRACTORY METALS
SCHOTTKY BARRIER SOLAR CELLS
SEMICONDUCTOR JUNCTIONS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
SUBSTRATES
SURFACE COATING
SURFACE FINISHING
TRANSITION ELEMENTS