Characterization of optical coatings with backscattering spectrometry
Journal Article
·
· Appl. Opt.; (United States)
We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5--5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.
- Research Organization:
- University of Arizona, Physics Department, Tucson, Arizona 85721(US)
- OSTI ID:
- 5972552
- Journal Information:
- Appl. Opt.; (United States), Journal Name: Appl. Opt.; (United States) Vol. 28:14; ISSN APOPA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BACKSCATTERING
BEAMS
CHARGED PARTICLES
CHEMICAL ANALYSIS
COATINGS
COLLISIONS
DIMENSIONS
ELEMENTS
ENERGY RANGE
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HELIUM IONS
ION BEAMS
ION COLLISIONS
IONS
MAGNESIUM COMPOUNDS
MAGNESIUM FLUORIDES
MEMORY DEVICES
METALS
MEV RANGE
MEV RANGE 01-10
MIRRORS
SCATTERING
SEMIMETALS
SILICON
STOICHIOMETRY
THICKNESS
THIN FILM STORAGE DEVICES
TRANSITION ELEMENTS
TUNGSTEN
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BACKSCATTERING
BEAMS
CHARGED PARTICLES
CHEMICAL ANALYSIS
COATINGS
COLLISIONS
DIMENSIONS
ELEMENTS
ENERGY RANGE
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HELIUM IONS
ION BEAMS
ION COLLISIONS
IONS
MAGNESIUM COMPOUNDS
MAGNESIUM FLUORIDES
MEMORY DEVICES
METALS
MEV RANGE
MEV RANGE 01-10
MIRRORS
SCATTERING
SEMIMETALS
SILICON
STOICHIOMETRY
THICKNESS
THIN FILM STORAGE DEVICES
TRANSITION ELEMENTS
TUNGSTEN