Reactions of optical materials and coatings with gaseous F/sub 2/

Journal Article · Mon Feb 29 23:00:00 EST 1988 · Inorg. Mater. (Engl. Transl.); (United States)

OSTI ID:6084864

Vvedenskii, V D; Mikheev, L D; Sagitov, S I; Sukhoverkhov, V F; Stavrovskii, D B

The authors have examined optical coatings resistant to fluorides because of extensive research on excimer lasers for the ultraviolet and visible ranges. The gas mixtures usually contain F/sub 2/ as well as XeF/sub 2/ and KrF/sub 2/, whose effects on optical films vary. They have examined various substrates, as well as single-layer (protective) and multilayer coatings (protective and reflective) made of metal fluorides and oxides. The dielectric coatings were deposited by electron-beam and resistive-evaporation techniques under vacuum. The coatings and the bulk specimens were treated with F/sub 2/ gas at 5 kPA for 1.5 and 15 h. The quality was checked after etching from the diffuse-scattering coefficient.

• Research Organization: N.S. Kurnakov Institute of General and Inorganic Chemistry (USSR)
• OSTI ID: 6084864
• Journal Information: Inorg. Mater. (Engl. Transl.); (United States), Journal Name: Inorg. Mater. (Engl. Transl.); (United States) Vol. 23:10; ISSN INOMA
• Country of Publication: United States
• Language: English

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