Monte Carlo simulation of 1--10-keV electron scattering in an aluminum target

Journal Article · Tue Dec 01 04:00:00 EST 1981 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.328730· OSTI ID:5945825

Kotera, M; Murata, K; Nagami, K

New Monte Carlo simulations of electron scattering based on the single scattering model have been performed in the low-energy region for an aluminum target, where two basic equations are required, namely the elastic scattering cross section and the energy-loss rate. We investigated the screened Rutherford equation and the Mott equation for two different atomic potentials for the former, and the Rao Sahib-Wittry equation (the modified Bethe equation) for the latter. The validity of each model is discussed in a comparison between Monte Carlo results and experimental results such as the electron range, electron backscattering, and electron transmission which have been reported by various authors. Consequently, it was found that a combination of the Mott cross section and the Rao Sahib-Wittry equation showed the best accuracy. However, the accuracy of a previous model with the screened Rutherford equation is not as bad as aniticipated because of the higher accuracy of the Born approximation for light elements such as Al, compared to Au.

• Research Organization: Department of Electronics, College of Engineering, University of Osaka Prefecture, Sakai, Osaka, Japan
• OSTI ID: 5945825
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 52:12; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACCURACY
ALUMINIUM
BACKSCATTERING
BORN APPROXIMATION
COLLISIONS
COMPARATIVE EVALUATIONS
CROSS SECTIONS
ELASTIC SCATTERING
ELECTRON COLLISIONS
ELEMENTS
ENERGY LOSSES
ENERGY RANGE
EQUATIONS
KEV RANGE
LOSSES
MATHEMATICAL MODELS
METALS
MONTE CARLO METHOD
SCATTERING
SCREENING
TARGETS
TRANSMISSION