0. 1-/mu/m gate-length superconducting FET
Journal Article
·
· IEEE Electron Device Lett.; (United States)
A superconducting field-effect transistor (FET) with a 0.1-/mu/m-length gate electrode was fabricated and tested at liquid-helium temperature. Two superconducting electrodes (source and drain) were formed on the same Si substrate surface with an oxide-insulated gate electrode by a self-aligned fabrication process. Superconducting current flowing through the semiconductor (Si) between the two superconducting electrodes (Nb) was controlled by a gate-bias voltage.
- Research Organization:
- Hitachi Ltd., Kokubunji, Tokyo (Japan). Central Research Lab.
- OSTI ID:
- 5940988
- Journal Information:
- IEEE Electron Device Lett.; (United States), Journal Name: IEEE Electron Device Lett.; (United States) Vol. 10:2; ISSN EDLED
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CHALCOGENIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRONIC CIRCUITS
ELEMENTS
FABRICATION
FIELD EFFECT TRANSISTORS
FLUIDS
GASES
GATING CIRCUITS
HELIUM
METALS
NIOBIUM
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PERFORMANCE TESTING
PHYSICAL PROPERTIES
RARE GASES
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
SUPERCONDUCTIVITY
TESTING
TRANSISTORS
TRANSITION ELEMENTS
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CHALCOGENIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRONIC CIRCUITS
ELEMENTS
FABRICATION
FIELD EFFECT TRANSISTORS
FLUIDS
GASES
GATING CIRCUITS
HELIUM
METALS
NIOBIUM
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PERFORMANCE TESTING
PHYSICAL PROPERTIES
RARE GASES
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
SUPERCONDUCTIVITY
TESTING
TRANSISTORS
TRANSITION ELEMENTS