Effects of deposition rate and substrate temperature on the orientation and the growth of YBa sub 2 Cu sub 3 O sub x thin films

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:5932750

Zheng, J Q; Wang, X K; Shih, M; Williams, S; So, J; Lee, S J; Dutta, P; Chang, R P.H.; Ketterson, J B ^[1]

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1. Northwestern Univ., Evanston, IL (United States). Materials Research Center

This paper reports what the authors believe to be the first real time, in situ studies of film growth by sputtering using synchrotron X-rays; the structure and growth habit of YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) thin films deposited on (100) SrTiO{sub 3} in a miniature, faced- magnetron sputtering system have been investigated. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes. At low substrate temperatures and low deposition rates, the films grow preferentially along the a- axis. In contrast, higher substrate temperatures and high deposition rates favor c-axis oriented film growth with some admixture of (220). The X-ray diffraction peaks were monitored in real time revealing that both a-axis and c-axis oriented grains nucleated on the surface of the (100) SrTiO{sub 3} between 625{degrees} and 765{degrees}C, although the volume fraction of each orientation was temperature dependent.

• OSTI ID: 5932750
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ACCELERATORS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
CYCLIC ACCELERATORS
DEPOSITION
DIFFRACTION
FILMS
GRAIN GROWTH
GRAIN ORIENTATION
MICROSTRUCTURE
ORIENTATION
OXIDES
OXYGEN COMPOUNDS
SCATTERING
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
SYNCHROTRONS
TEMPERATURE DEPENDENCE
THIN FILMS
TIN COMPOUNDS
TIN OXIDES
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES