In situ preparation of superconducting Bi-Sr-Ca-Cu-O thin films by high pressure DC sputtering
- Materials Research Lab., Industrial Technology Research Inst., Chutung, Hsinchu 31015 (TW)
This paper reports on superconducting Bi-Sr-Ca-Cu-O films on (100) MgO substrates reproducibly prepared by the high pressure DC sputtering process without further annealing treatment. The sputtering gas was Ar-50% O{sub 2} and total gas pressure was 1.5 torr. The target was Bi{sub 2}Sr{sub 2}Ca{sub 1} {sub 3}Cu{sub 3}O{sub x} composite made by solid-state reaction. The substrate temperatures were 600-750{degrees} C. The film thickness is 0.8-1.5 Mm. The films are consisted of highly c-oriented Bi{sub 2}Sr{sub 2}Ca{sub 1}Cu{sub 2}O{sub x} phase. The best superconducting properties of the films are T{sub c} (onset) = 93 K and T{sub c} (R = O) = 68 K. The detailed process and effect of processing parameters on superconductivities, phases and surface morphologies of the films will be discussed.
- OSTI ID:
- 5932637
- Report Number(s):
- CONF-900944--
- Journal Information:
- IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Vol. 27:2; ISSN IEMGA; ISSN 0018-9464
- Country of Publication:
- United States
- Language:
- English
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360201* -- Ceramics
Cermets
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360202 -- Ceramics
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360204 -- Ceramics
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ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
FILMS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MORPHOLOGY
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
SUPERCONDUCTING FILMS
TRANSITION ELEMENT COMPOUNDS