The in-situ preparation and properties of Y-Ba-Cu-O thin films on the SrTiO sub 3 , Al sub 2 O sub 3 and Si substrates

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:5932632

Faley, M I; Gershenson, M E; Kuchta, N P; Salun, V S ^[1]

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1. Inst. of Radio Engineering and Electronics, USSR Academy of Sciences, 18 Marx av., GSP-3 Moscow (SU)

This paper discusses the in-situ preparation of Y-Ba-Cu-O thin (d = 0.1-1 {mu}m) films by the RF magnetron sputtering of ceramic YBa{sub 2}Cu{sub 3+y}O{sub x} targets on the single crystal SrTlO{sub 3}, Al{sub 2}O{sub 3} and Si heated substrates in the argon-oxygen-water vapor atmosphere. Special substrate beater was developed. Various buffer layers for Al{sub 2}O{sub 3} and Si substrates were used. The method of preparing the mirror-like surface films is described. Film surface degradation because of the storage in air was studied. Electrical and structural properties of these films are reported as well as the preliminary results of investigation of multilayer structures based on such films.

• OSTI ID: 5932632
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ATMOSPHERES
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CONTROLLED ATMOSPHERES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES