In-situ low-temperature growth of YBa sub 2 Cu sub 3 O sub 7 minus x films by reactive coevaporation

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:5932227

Tsuge, H; Matsukura, N ^[1]

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1. NEC Corp., Tokyo (Japan)

This paper reports on epitaxial YBa{sub 2}Cu{sub 3}O{sub 7{minus}x} films grown in-situ by reactive coevaporation using a triple-hearth electron-beam gun system, in which a single electron-beam is scanned over constituent metal sources. Superconducting properties were improved by using reactive oxygen species generated from an rf discharge during growth and cooling. Zero resistance temperatures Tc(R = O) of 86-91K and critical current densities of around 10{sup 6}A/cm{sup 2} at 77K were obtained over the entire MgO (100) substrate of 15 {times} 15 mm{sup 2}. The c-axis, a-axis and (110) oriented films were selectively grown on MgO(100), SrTiO{sub 3}(100) and SrTiO{sub 3}(110), respectively, in the wide substrate temperature range with crystallization temperature below 500{degrees} C.

• OSTI ID: 5932227
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTALLIZATION
CURRENT DENSITY
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRON GUNS
EPITAXY
FILMS
IN-SITU PROCESSING
MOLECULAR BEAM EPITAXY
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
PROCESSING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES