Quartz antenna for radio frequency ion source operation

Journal Article · Sun Feb 01 00:00:00 EST 1998 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1148708· OSTI ID:591930

Lee, Y; Gough, R A; Leung, K N; Perkins, L T; Pickard, D S; Vujic, J; Wu, L K ^[1]; Olivo, M; Einenkel, H ^[2]

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1. Lawrence Berkeley National Laboratory, University of California, Berkeley, California (United States)
2. Paul Scherrer Institute (PSI), CH-5232 Villigen-PSI (Switzerland)

Radio-frequency (rf) driven multicusp ion sources developed at the Lawrence Berkeley National Laboratory use an internal induction coil (antenna) for plasma generation. The copper rf-antenna with a thin layer of porcelain coating, which is presently used, cannot fully satisfy the increasing demands on source cleanliness and antenna lifetime under high power cw or pulsed operation in applications where water cooling is not possible. A quartz antenna has been designed and operated in the multicusp ion source. It has been demonstrated that the overall performance of the new antenna exceeds that of the regular porcelain-coated antenna. It can be operated with a long lifetime in different discharge plasmas. The quartz antenna has also been tested at the Paul Scherrer Institute for cw source operation at rf power higher than 5 kW. Results demonstrated that the antenna can survive under dense plasma discharge operations. {copyright} {ital 1998 American Institute of Physics.}

• OSTI ID: 591930
• Report Number(s): CONF-980145-; ISSN 0034-6748; TRN: 98:004870
• Journal Information: Review of Scientific Instruments, Vol. 69, Issue 2; Conference: 7. international conference on ion sources, Shirahama (Japan), 26-27 Jan 1998; Other Information: PBD: Feb 1998
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION
OPERATION
ION SOURCES
POWER
RF SYSTEMS
DESIGN
QUARTZ
PLASMA PRODUCTION
ANTENNAS