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Improvement of the lifetime of radio frequency antenna for plasma generation

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.1150407· OSTI ID:20215415
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1]
  1. Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)

At Lawrence Berkeley National Laboratory different antenna protection schemes have been investigated for the radio frequency-driven multicusp ion source. It was found that the antenna lifetime can be greatly enhanced by an additional shielding, which consists of porcelain, quartz or boron nitride. Different antenna configurations and their influence on the plasma generation will be discussed. Antenna life time greater than 500 hours continuous wave operation has been demonstrated in hydrogen plasma using a novel quartz antenna design. (c)

OSTI ID:
20215415
Journal Information:
Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 71; ISSN 0034-6748; ISSN RSINAK
Country of Publication:
United States
Language:
English

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