Ion bombardment of polyimide films

Journal Article · Sat Jul 01 04:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575779· OSTI ID:5893645

Bachman, B J; Vasile, M J

Surface modification techniques such as wet chemical etching, oxidizing flames, and plasma treatments (inert ion sputtering and reactive ion etching) have been used to change the surface chemistry of polymers and improve adhesion. With an increase in the use of polyimides for microelectronic applications, the technique of ion sputtering to enhance polymer-to-metal adhesion is receiving increased attention. For this study, the argon-ion bombardment surfaces of pyromellitic dianhydride and oxydianiline (PMDA--ODA) and biphenyl tetracarboxylic dianhydride and phenylene diamine (BPDA--PDA) polyimide films were characterized with x-ray photoelectron spectroscopy (XPS) as a function of ion dose. Graphite and high-density polyethylene were also examined by XPS for comparison of C 1/ital s/ peak width and binding-energy assignments. Results indicate that at low ion doses the surface of the polyimide does not change chemically, although adsorbed species are eliminated. At higher doses the chemical composition is altered and is dramatically reflected in the C 1/ital s/ spectra where graphiticlike structures become evident and the prominent carbonyl peak is reduced significantly. Both polyimides demonstrate similar chemical changes after heavy ion bombardment. Atomic composition of PMDA--ODA and BPDA--PDA polymers are almost identical after heavy ion bombardment.

• Research Organization: ATandT Bell Laboratories, Murray Hill, New Jersey 07974(US)
• OSTI ID: 5893645
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Journal Issue: 4 Vol. 7:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
CARBONYLS
CHARGED PARTICLES
CHEMICAL COMPOSITION
COLLISIONS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
FILMS
IMIDES
ION COLLISIONS
IONIZING RADIATIONS
IONS
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
POLYMERS
RADIATIONS
SPECTROSCOPY
SURFACE PROPERTIES
THIN FILMS
X RADIATION