ELLIPSE user's manual and program reference

Technical Report · Tue Feb 28 23:00:00 EST 1989

DOI:https://doi.org/10.2172/5889430· OSTI ID:5889430

Tardy, H. L.

A new program, ELLIPSE, for the analysis of ellipsometric data is described. The program is interactive and includes on-line help, performs explicit error analysis for single-angle-of-incidence measurements, allows the input of four-zone null data, and performs least-squares analysis of multiple-angle-of-incidence data. Solutions for the transparent-film-on-substrate model are obtained using decoupled equations for film thickness and index. No initial guess is required for thickness, and the algorithm is insensitive to the initial guess for film index. This document combines the user's manual and program description for ELLIPSE, and includes several examples of its use. 11 refs.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5889430
• Report Number(s): SAND-89-0008; ON: DE89014575
• Country of Publication: United States
• Language: English

Related Subjects

99 GENERAL AND MISCELLANEOUS
990220* -- Computers
Computerized Models
& Computer Programs-- (1987-1989)
ALGORITHMS
COMPUTER CODES
COMPUTER PROGRAM DOCUMENTATION
DIMENSIONS
DOCUMENT TYPES
E CODES
ELLIPSOMETRY
ERRORS
FILMS
FORTRAN
LEAST SQUARE FIT
MANUALS
MATHEMATICAL LOGIC
MATHEMATICS
MAXIMUM-LIKELIHOOD FIT
MEASURING METHODS
NUMERICAL SOLUTION
PROGRAMMING LANGUAGES
STATISTICS
THICKNESS
THIN FILMS