Film thickness determination of PMMA on InP by ellipsometry
The thickness of polymethylmethacrylate (PMMA) films deposited in solution on InP is measured by ellipsometry to determine its dependence on terminal spin speed. The PMMA solution behaves as a steady-state Newtonian fluid. Film thickness in excess of the periodic thickness is measured by combining data taken at three angles of incidence; a procedure for applying this technique is discussed. The main feature consists of assigning the film index from data taken at the incident angle where the ellipsometer readings are most sensitive to film index, and using this index in determining the film thickness at the other two angles. The basis supporting this procedure is presented, and the dependence of the ellipsometric model on uncertainties in the assignment of film and substrate optical constants is discussed specifically in terms of its effect on the three-angle technique.
- Research Organization:
- Department of Electrical Engineering, Colorado State University, Fort Collins, Colorado
- OSTI ID:
- 6466642
- Journal Information:
- J. Electrochem. Soc.; (United States), Journal Name: J. Electrochem. Soc.; (United States) Vol. 131:3; ISSN JESOA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360601* -- Other Materials-- Preparation & Manufacture
ANGULAR MOMENTUM
DEPOSITION
DIMENSIONS
ELLIPSOMETRY
ESTERS
FABRICATION
FILMS
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
MEASURING METHODS
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PARTICLE PROPERTIES
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PMMA
PNICTIDES
POLYACRYLATES
POLYMERS
POLYVINYLS
SPIN
SURFACE COATING
THICKNESS