Polysilicon resistor modification with hydrogen plasmas on fabricated integrated circuits

Journal Article · Sat Aug 01 00:00:00 EDT 1987 · J. Electrochem. Soc.; (United States)

DOI:https://doi.org/10.1149/1.2100824· OSTI ID:5861890

Ginley, D S; Hellmer, R P; Lum, W Y

Over the course of the last five to six years, it has been demonstrated that monatomic hydrogen plasmas can be quite effective in passivating the defect states in polycrystalline silicon grain boundaries. As the density of grain boundary defects is reduced, significant increases in majority conduction across the boundary are observed along with a large reduction in the number of minority carrier traps. In polysilicon solar cells, significant junction improvements are observed as well. These improvements in material and device properties are significant enough to warrant the incorporation of these processes in a number of commercial polysilicon solar cell process lines.

• Research Organization: Sandia National Labs., Organization 1144, Albuquerque, NM 87185
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5861890
• Journal Information: J. Electrochem. Soc.; (United States), Journal Name: J. Electrochem. Soc.; (United States) Vol. 134:8A; ISSN JESOA
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
360602 -- Other Materials-- Structure & Phase Studies
360603 -- Materials-- Properties
CHALCOGENIDES
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CRYSTALS
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
FABRICATION
GLASS
GRAIN BOUNDARIES
HYDROGEN
INTEGRATED CIRCUITS
JUNCTIONS
METALLOGRAPHY
METALS
MICROELECTRONIC CIRCUITS
MICROSTRUCTURE
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PASSIVATION
PHOSPHORUS COMPOUNDS
PHOSPHORUS OXIDES
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLASMA
POLYCRYSTALS
RESISTORS
RF SYSTEMS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR JUNCTIONS
SEMICONDUCTOR RESISTORS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
TRAPS