Electrodes for PbZr[sub x]Ti[sub 1[minus]x]O[sub 3] ferroelectric thin films
- Virginia Polytechnic Inst. and State Univ., Blacksburg, VA (United States). Dept. of Materials Science and Engineering
Interface-related degradation problems in PbZr[sub x]Ti[sub 1[minus]x]O[sub 3] (PZT) thin- film nonvolatile memories have led to the search for alternate electrode materials to replace the conventional metal electrodes. In this work, the suitability of ceramic electronic conductors [e.g., ruthenium oxide (RuO[sub 2]) and indium-tin-oxide (ITO)] as contact metallization for ferroelectric PbZr[sub x]Ti[sup 1[minus]x]O[sub 3] thin films has been investigated using techniques such as Rutherford backscattering spectrometry, X-ray diffraction, and electron spectroscopy for chemical analysis. Thin films of RuO[sub 2] and ITO were deposited onto Si Substrates by reactive sputtering. Sol-gel derived PZT thin films then were deposited onto the conducting oxides and the samples were annealed at various temperatures between 400 and 700 C. Less intermixing was observed in Si/RuO[sub 2]/PZT films when compared to Si/ITO/PZT under similar processing conditions. The ferroelectric properties of PZT films (hysteresis, fatigue, and low voltage breakdown) on RuO[sub 2] electrodes were compared to those on PT electrodes. PZT films show improved fatigue properties on RuO[sub 2] electrodes. The films on RuO[sub 2] electrodes also showed better current-voltage characteristics (I-V) and time-dependent dielectric breakdown properties (TDDB).
- OSTI ID:
- 5851625
- Journal Information:
- Journal of the Electrochemical Society; (United States), Journal Name: Journal of the Electrochemical Society; (United States) Vol. 140:9; ISSN JESOAN; ISSN 0013-4651
- Country of Publication:
- United States
- Language:
- English
Similar Records
Effect of {ital B}-site cation stoichiometry on electrical fatigue of RuO{sub 2}//Pb(Zr{sub {ital x}}Ti{sub 1-{ital x}})O{sub 3}//RuO{sub 2} capacitors
Reactive ion etching of lead zirconate titanate (PZT) thin film capacitors
Related Subjects
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
CHALCOGENIDES
COLLOIDS
DATA
DEPOSITION
DIELECTRIC PROPERTIES
DISPERSIONS
ELECTRICAL PROPERTIES
ELECTRODES
EXPERIMENTAL DATA
FATIGUE
FERROELECTRIC MATERIALS
FILMS
GELS
HYSTERESIS
INDIUM COMPOUNDS
INDIUM OXIDES
INFORMATION
LEAD COMPOUNDS
MECHANICAL PROPERTIES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PZT
REFRACTORY METAL COMPOUNDS
RUTHENIUM COMPOUNDS
RUTHENIUM OXIDES
SOLS
THIN FILMS
TIN COMPOUNDS
TIN OXIDES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS