Precision stabilization system for MIS-structure rf capacitance

Journal Article · Sat Jan 31 23:00:00 EST 1987 · Instrum. Exp. Tech. (Engl. Transl.); (United States)

OSTI ID:5843137

Antonenko, V I; Zhdan, A G

A relatively simple resonant small-signal system is described for stabilization of the rf capacitance of MIS structures in the frequency range of 1-30 MHz that is based on a VM560 Q-meter. The relative sensitivity to capacitance variation ..delta..C/C is 2 x 10/sup -6/ at a level of C approx. 500 pF, the absolute sensitivity ..delta..C approx. 1 fF, and the response time is approx. 0.1 sec. The system is designed for relaxation spectroscopy of boundary states in MIS structures in the constant-capacitance mode by methods of unsteady capacitance and thermostimulated discharge of an MIS capacitor.

• Research Organization: Institute of Radio Engineering and Electronics, Moscow, USSR
• OSTI ID: 5843137
• Journal Information: Instrum. Exp. Tech. (Engl. Transl.); (United States), Journal Name: Instrum. Exp. Tech. (Engl. Transl.); (United States) Vol. 29:4; ISSN INETA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
CAPACITANCE
CAPACITORS
ELECTRIC MEASURING INSTRUMENTS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
EQUIPMENT
INTERFACES
MATERIALS
MEASURING INSTRUMENTS
PHOTOELECTRIC EFFECT
PHOTOELECTROMAGNETIC EFFECTS
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SENSITIVITY
SPECTROMETERS
STABILIZATION
TEMPERATURE DEPENDENCE
TIMING PROPERTIES