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U.S. Department of Energy
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Advanced processing of semiconductor devices II

Conference ·
OSTI ID:5835585

These proceedings collect papers on semiconductors. Topics include: reactive ion etching of laser structures, ion beam enhanced mixing of AlGaAs superlattices, defects in GaAs epilayers, and rapid isothermal processing of dielectrics.

OSTI ID:
5835585
Report Number(s):
CONF-8803173-
Country of Publication:
United States
Language:
English