Advanced processing of semiconductor devices II
Conference
·
OSTI ID:5835585
These proceedings collect papers on semiconductors. Topics include: reactive ion etching of laser structures, ion beam enhanced mixing of AlGaAs superlattices, defects in GaAs epilayers, and rapid isothermal processing of dielectrics.
- OSTI ID:
- 5835585
- Report Number(s):
- CONF-8803173-
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
DIELECTRIC MATERIALS
ETCHING
FABRICATION
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
ION BEAMS
ISOTHERMS
LASER MATERIALS
MATERIALS
PNICTIDES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SUPERLATTICES
SURFACE FINISHING
360601* -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
DIELECTRIC MATERIALS
ETCHING
FABRICATION
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
ION BEAMS
ISOTHERMS
LASER MATERIALS
MATERIALS
PNICTIDES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SUPERLATTICES
SURFACE FINISHING