Method for irradiating a specimen by corpuscular-beam radiation
Patent
·
OSTI ID:5829801
A method for irradiating a specimen by corpuscular beam radiation in which an irradiated surface pattern including isolated areas unexposed to the corpuscular beam surrounded at least almost completely by areas exposed to the beam is generated on a specimen by first imaging a mask which is supported by a support grid comprising a plurality of parallel strips and having a pattern corresponding to the surface pattern to be generated, on the specimen by shadow projection by means of a corpuscular beam consisting of a plurality of parallel rays. The image of the supporting grid is then removed by tilting the corpuscular beam in a direction perpendicular to the longitudinal axis of the strips forming the support grid through an angle which is at least equal in radians to the ratio of the width of the strips to the distance between the mask and the specimen. 1 claim.
- Assignee:
- Siemens Aktiengesellschaft
- Patent Number(s):
- US 4136285
- OSTI ID:
- 5829801
- Country of Publication:
- United States
- Language:
- English
Similar Records
Charged-particle beam optical apparatus for irradiating a specimen in a two-dimensional pattern
Diagnostic radiology installation
Shadow projection mask for ion implantation and ion beam lithography
Patent
·
Tue May 03 00:00:00 EDT 1977
·
OSTI ID:7221989
Diagnostic radiology installation
Patent
·
Tue Oct 18 00:00:00 EDT 1983
·
OSTI ID:5312562
Shadow projection mask for ion implantation and ion beam lithography
Patent
·
Tue May 15 00:00:00 EDT 1984
·
OSTI ID:6366844