High-yield sputtering events for Ar/sup +/-ion bombardment of Cu in the energy range 1--20 keV

Journal Article · Tue Aug 01 04:00:00 EDT 1989 · Phys. Rev. B: Condens. Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.40.2090· OSTI ID:5807116

Smith, R

A comparison of sputtering statistics for high- and low-index crystal planes of Cu subjected to Ar/sup +/-ion bombardment is presented and some high-yield events are analyzed in detail. It is shown that a significant contribution to the average sputtering yield at 20 keV comes from a small number of ion trajectories which sputter a large number of atoms and that the damage produced by such impacts can be spread laterally for distances of the order of a hundred Angstroms or more.

• Research Organization: Department of Physics, Naval Postgraduate School, Monterey, California 93943 (US)
• OSTI ID: 5807116
• Journal Information: Phys. Rev. B: Condens. Matter; (United States), Journal Name: Phys. Rev. B: Condens. Matter; (United States) Vol. 40:4; ISSN PRBMD
• Country of Publication: United States
• Language: English

Related Subjects

656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
BORN-MAYER EQUATION
CHARGED PARTICLES
COLLISIONS
COPPER
ELEMENTS
ENERGY RANGE
EQUATIONS
IONS
KEV RANGE
KEV RANGE 01-10
KEV RANGE 10-100
METALS
SIMULATION
SPUTTERING
SURFACES
TOPOGRAPHY
TRAJECTORIES
TRANSITION ELEMENTS