Low-temperature process for the preparation of high T/sub c/ superconducting thin films

Journal Article · Mon Dec 28 04:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98904· OSTI ID:5798974

Adachi, H; Hirochi, K; Setsune, K; Kitabatake, M; Wasa, K

We have established the low-temperature process for the preparation of high T/sub c/ superconducting films by rf magnetron sputtering. The films were deposited at a temperature (650 /sup 0/C) lower than the tetragonal-orthorhombic transition point with sufficient crystallizing and oxidizing conditions. The as-deposited Er-Ba-Cu-O film on MgO exhibited a sharp superconductive transition with zero resistance at 86 K. This process prevented diffusion at the film and substrate interface and reduced the porous structure in the films.

• Research Organization: Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka 570, Japan
• OSTI ID: 5798974
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:26; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ATOM TRANSPORT
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
DIFFUSION
EUROPIUM COMPOUNDS
EUROPIUM OXIDES
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
NEUTRAL-PARTICLE TRANSPORT
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
POROSITY
RADIATION TRANSPORT
RARE EARTH COMPOUNDS
SPUTTERING
SUPERCONDUCTING FILMS
TRANSITION ELEMENT COMPOUNDS
VAPOR DEPOSITED COATINGS