Particle emission induced by the interaction of highly charged slow Xe-ions with a SiO₂ surface

Conference · Mon Sep 09 00:00:00 EDT 1991

OSTI ID:5798669

Schiwietz, G. ^[1]; Schneider, D. ^[2]; Clark, M. ^[2]; Skogvall, B. ^[1]; DeWitt, D. ^[2]; McDonald, J. ^[2]

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1. Hahn-Meitner Inst. (HMI), Berlin (Germany)
2. Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sputtering of surface atoms by low energy (a few keV) heavy ions is a commonly used technique in material science and applied physics. In general, sputtering occurs via nuclear energy transfer processes and is determined mainly by the atom-atom interaction potentials. In the energy range of interest these potentials depend only slightly on the charge state of one collision partner if the other is neutral. The development of new ion-sources, however, allows for the use of ions with charged states of q > 50. For these highly charged ions it is conceivable that electronic processes come into play as well. If, for example, the density of charged surface atoms exceeds a certain limit, then particle emission can occur via the electrostatic repulsion of target atoms, the so-called Coulomb explosion. Indications for such electronic effects have been found in a few investigations of ion-induced sputtering Si (q < 12 in Ar^q+). However, the order of magnitude of this effect is not clear until now. In this work we present preliminary data on sputtering, ion backscattering, electron and photon emission from SiO₂ surface induced by incident Xe ions of very high charge states (q=30--50). The experiment was performed at the electron beam ion trap (EBIT) of the Lawrence Livermore National Laboratory using a time-of-flight (TOF) ion analyzer-system from the Hahn-Meitner-Institute, Berlin.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5798669
• Report Number(s): UCRL-JC--109057; CONF-910931--3; ON: DE92007307
• Resource Type: Conference paper/presentation
• Conference Information: 12. European conference on surface science, Stockholm (Sweden), 9-12 Sep 1991
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204 -- Ceramics
Cermets
&amp; Refractories-- Physical Properties
665300* -- Interactions Between Beams &amp; Condensed Matter-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BACKSCATTERING
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
ELECTRON BEAM ION SOURCES
EMISSION
ION BEAMS
ION COLLISIONS
ION SOURCES
ION-MOLECULE COLLISIONS
IONS
MOLECULE COLLISIONS
MULTICHARGED IONS
OXIDES
OXYGEN COMPOUNDS
PHOTOEMISSION
SCATTERING
SECONDARY EMISSION
SILICON COMPOUNDS
SILICON OXIDES
SPUTTERING
SURFACES
TIME-OF-FLIGHT METHOD
XENON 132 BEAMS
XENON IONS