A comparative study of CoZrNb and NiFe targets in discharge and sputtering using plasma confining type and magnetron sputtering method

Journal Article · Sat Sep 01 00:00:00 EDT 1990 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (USA)

DOI:https://doi.org/10.1109/20.104422· OSTI ID:5779119

Takahashi, T; Ikeda, N ^[1]; Naoe, M ^[2]

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1. Toyama Univ. (Japan). Faculty of Engineering
2. Tokyo Inst. of Tech. (Japan). Faculty of Engineering

CoZrNb and NiFe films have been deposited by a plasma confining type of magnetron sputtering method which can highly improve the utilization efficiency of magnetic alloy target with high permeability and completely suppress the bombardment of high energy {gamma}-electrons to substrate. By applying an auxiliary solenoid magnetic field H{sub E} perpendicular to the target plane, the target utilization efficiencies in volume of whole body for CoZrNb, and NiFe targets were improved from 32 to 51%, and from 25 to 41%, respectively. In both targets, the maximum deposition rates were above 0.2 {mu}m/min. Al CoZrNb films deposited by this method were amorphous. All NiFe films deposited by this method were composed of fcc phase crystallites with NiFe(111) plane parallel to the film plane. For CoZrNb films, with applying H{sub E}, the saturation magnetization 4{pi}Ms, and the coercivity Hc varied from 11.5 to 14 kG, and from 0.1 to 0.9 Oe, respectively. On the other hand, for NiFe films, 4{pi}Ms, and Hc were constants of about 9.5 kG, and about 0.5O e, respectively.

• OSTI ID: 5779119
• Journal Information: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (USA), Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (USA) Vol. 26:5; ISSN IEMGA; ISSN 0018-9464
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360104 -- Metals & Alloys-- Physical Properties
640304 -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
AMORPHOUS STATE
BEAMS
COBALT ALLOYS
COERCIVE FORCE
COMPARATIVE EVALUATIONS
ELECTRIC COILS
ELECTRICAL EQUIPMENT
ELECTRON BEAMS
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FERROMAGNETIC MATERIALS
FILMS
IRON ALLOYS
LEPTON BEAMS
MAGNETIC MATERIALS
MAGNETRONS
MATERIALS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NICKEL ALLOYS
NIOBIUM ALLOYS
PARTICLE BEAMS
SOLENOIDS
SPUTTERING
THIN FILMS
ZIRCONIUM ALLOYS