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Dielectric properties for SF/sub 6/ and SF/sub 6/ mixtures predicted from basic data

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.325814· OSTI ID:5777413

We have calculated ..cap alpha.. and eta, the ionization and attachment coefficients, and (E/N) *, the limiting breakdown electric-field--to--gas-density ratio, in SF/sub 6/ and SF/sub 6/ mixtures by numerically solving the Boltzmann equation for the electron energy distribution. The calculations require a knowledge of several electron collision cross sections. Published momentum transfer and ionization cross sections for SF/sub 6/ were used. We measured various attachment cross sections for SF/sub 6/ using electron-beam techniques with mass spectrometric ion detection. We determined a total cross section for electronic excitation of SF/sub 6/ by comparing the predicted values of ..cap alpha.., eta, and (E/N) * with our measured values obtained from spatial current growth experiments in SF/sub 6/ in uniform fields over an extended range of E/N. With this self-consistent set of SF/sub 6/ cross sections, together with published He and N/sub 2/ cross sections, it was then possible to predict the dielectric properties of SF/sub 6/-He and SF/sub 6/-N/sub 2/ mixtures. Published experimental values of ..cap alpha.. for the SF/sub 6/-He mixtures lie between the values of ..cap alpha.. calculated with and without ionization of SF/sub 6/ by excited He atoms. Published experimental values of (E/N) * agree with our calculations to within 5% in both the SF/sub 6/-He and the SF/sub 6/-N/sub 2/ mixtures.

Research Organization:
Westinghouse RandD Center, Pittsburgh, Pennsylvania 15235
OSTI ID:
5777413
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 50:11; ISSN JAPIA
Country of Publication:
United States
Language:
English