Preparation of high- T sub c superconducting Bi-Sr-Ca-Cu-O films by organometallic chemical vapor deposition using second-generation fluorocarbon-based precursors

Journal Article · Fri Feb 15 04:00:00 EST 1991 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.348631· OSTI ID:5772158

Zhang, J M; Wessels, B W ^[1]; Richeson, D S; Marks, T J ^[2]; DeGroot, D C; Kannewurf, C R ^[3]

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1. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (US)
2. Department of Chemistry, Northwestern University, Evanston, Illinois 60208 (USA)
3. Department of Electrical Engineering and Computer Science, Northwestern University, Evanston, Illinois 60208 (USA)

High-{ital T}{sub {ital c}} superconducting Bi-Sr-Ca-Cu-O thin films with good electrical properties and smooth surface morphologies have been prepared by low-pressure organometallic chemical vapor deposition using the new fluorocarbon-based precursors Sr(hexafluoroacetylacetonate){sub 2} {center dot} tetraglyme and Ca(hexafluoroacetylacetonate){sub 2} {center dot} triglyme together with Cu(acetylacetonate){sub 2} and triphenylbismuth (Bi(C{sub 6}H{sub 5}){sub 3}). The fluorinated precursors are air-stable and exhibit high, stable volatility even after prolonged heating. X-ray diffraction measurements reveal that the films deposited at 650 {degree}C contain some fluoride phases but no high-{ital T}{sub {ital c}} phases. However, post-annealing in oxygen produces films composed predominantly of the Bi{sub 2}Sr{sub 2}CaCu{sub 2}O{sub {ital x}} phase with high preferential orientation of the crystallite {ital c} axes perpendicular to the substrate surface. Four-probe resistivity measurements indicate the onset of film superconductivity at {similar to}100 K and zero resistivity achieved at 73 K.

• OSTI ID: 5772158
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:4; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
ELECTRICAL PROPERTIES
FILMS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
MORPHOLOGY
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
X-RAY DIFFRACTION