Kinetics of silane decomposition by atomic and molecular nitrogen metastables

Journal Article · Thu Jan 24 04:00:00 EST 1991 · Journal of Physical Chemistry; (USA)

DOI:https://doi.org/10.1021/j100155a038· OSTI ID:5760939

Piper, L G; Caledonia, G E ^[1]

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1. Physical Sciences Inc., Andover, MA (USA)

The authors have studied the reactions of a number of metastable nitrogen species with silane in a discharge-flow reactor. By monitoring the decays in the metastable number densities both as a function of time and as a function of silane number density, they have determined reaction rate coefficients, in units of 10{sup {minus}11} cm{sup 3} molecule{sup {minus}1} s{sup {minus}1}, for the following species: N{sub 2}(A{sup 3}{Sigma}{sub u}{sup +}, {nu}{prime} = 0), 0.84 {plus minus} 0.16; N{sub 2}(A{sup 3}{Sigma}{sub u}{sup +}, {nu}{prime} = 1), 1.23 {plus minus} 0.24; N{sub 2}(a{prime}{sup 1}{Sigma}{sub u}{sup {minus}},{nu}{prime} = 0), 20.7 {plus minus} 5.0; N({sup 2}D), 5.9 {plus minus} 1.3; N({sup 2}P), 0.09 {plus minus} 0.03; and N({sup 4}S), < 0.008. When silane is added to a flow containing only N{sub 2}(A{sup 3}{Sigma}{sub u}{sup +}), they observe no spectral features of any kind between 220 and 850 nm. Adding silane to a flow of atomic nitrogen excites several atomic lines of silicon, the SiN and SiH bands between 400 and 430 nm, and a continuum extending between 270 and 450 nm, all very weakly.

• OSTI ID: 5760939
• Journal Information: Journal of Physical Chemistry; (USA), Journal Name: Journal of Physical Chemistry; (USA) Vol. 95:2; ISSN JPCHA; ISSN 0022-3654
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical &amp; Physicochemical Properties
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
DATA
DECOMPOSITION
ELEMENTS
EXPERIMENTAL DATA
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
KINETICS
MEASURING METHODS
NITROGEN
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
SILANES
SILICON COMPOUNDS