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Disilicide solid solutions, phase diagram, and resistivities. I. TiSi/sub 2/-WSi/sub 2/

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.337679· OSTI ID:5754671

The pseudobinary system TiSi/sub 2/--WSi/sub 2/ has been investigated from about 85% TiSi/sub 2/ to 100% WSi/sub 2/ up to a temperature of 1100/sup 0/C. The equilibrium phase diagram which has been established contains a continuous (from 15% to 100% WSi/sub 2/) solid solution with a hexagonal structure (TaSi/sub 2/ type) at low temperatures, below approx.550/sup 0/C. At about 550/sup 0/C WSi/sub 2/-rich alloys split into two phases, the normal tetragonal phase of WSi/sub 2/, which has a very limited solubility for TiSi/sub 2/, and the hexagonal (TaSi/sub 2/) phase with the amount of WSi/sub 2/ in solution decreasing with increasing temperature at about 50% at 1100/sup 0/C. The resistivity of the different alloys has been studied as a function of annealing temperature. There is considerable excess resistivity due to alloy scattering and no evidence of a marked difference in resistivity between the two phases.

Research Organization:
IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598
OSTI ID:
5754671
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 60:1; ISSN JAPIA
Country of Publication:
United States
Language:
English