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Metalorganic chemical vapor deposition of Bi-Sr-Ca-Cu-O ultrathin films

Journal Article · · Journal of Applied Physics; (USA)
DOI:https://doi.org/10.1063/1.349524· OSTI ID:5743130
; ; ; ; ;  [1]
  1. Superconductivity Research Laboratory, ISTEC, 10-13 Shinonome 1-chome Koto-ku, Tokyo 135, Japan (JP)
The metalorganic chemical vapor deposition of Bi-Sr-Ca-Cu-O ultrathin films was performed on single-crystal (100) MgO substrates. An ultrathin film with average thickness of 3.5 nm was found to exhibit the full superconductivity at more than 60 K. The critical current density of a 5-nm-thick film was found to be strongly anisotropic for applied fields parallel and perpendicular to the film plane. In particular, in a field parallel to a film plane, the critical current density was constant up to 6 T even at 50 K, near the critical temperature. From the x-ray-diffraction patterns of ultrathin films prepared at the deposition rates of 3 and 0.3 nm/min, a Bi{sub 2}Sr{sub 2}CaCu{sub 2}O{sub {ital x}} (2212) phase was found to be formed at the first stage of deposition regardless of the deposition rate, while a Bi{sub 2}Sr{sub 2}Ca{sub 2}Cu{sub 3}O{sub {ital x}} (2223) phase was found to be formed in the earlier stage of deposition when the deposition rate was decreased.
OSTI ID:
5743130
Journal Information:
Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 70:3; ISSN 0021-8979; ISSN JAPIA
Country of Publication:
United States
Language:
English