A high-resolution study of Si, P, S, Cl, and Ar LMM Auger electrons produced by 0. 4 to 2. 0 MeV proton bombardment

Thesis/Dissertation · Mon Jan 01 04:00:00 EST 1990

OSTI ID:5732465

Awuku, H T

Gaseous targets of SiH{sub 4}, PH{sub 3}, SO{sub 2}, Ch{sub 3}Cl, and Ar have been bombarded by 0.4 to 2.0 MeV protons to produce LMM Auger yields of Si, P, S, Cl and Ar at 0.45 eV resolution. The LMM Auger electrons were then transmitted in a constant energy mode and detected by means of a spherical spectrometer positioned at an angle of 90 to the primary proton beam direction. From the measured Auger yields, the L-shell ionization cross sections for the elements Si, P, S, Cl, and Ar have been obtained. The L-shell ionization cross sections obtained thereby are compared to existing experimental L-shell ionization cross sections and also to various theoretical predictions. Also, the LMM Auger spectra in gaseous SiH{sub 4}, SO{sub 2}, CH{sub 3}Cl and Ar excited by 1.4 MeV H{sub 2}{sup +} ion bombardment and for PH{sub 3} under 0.7 MeV H{sub 2}{sup +} ion bombardment at 0.3 eV resolution have been measured. With the exception of SO{sub 2}, all the other spectra have been decomposed into several lines using Gaussian curve-fitting methods. The measured line energies, line widths, and line intensities in the various spectra are presented. The line energies in the SiH{sub 4} spectrum measured are compared to experimental energies obtained elsewhere and with existing theoretical predictions. Also for Ph{sub 3} and Ch{sub 3}Cl, the line energies measured are compared to calculated Auger energies using a simple model approach. Possible final Auger transitions have been assigned.

• Research Organization: Baylor Univ., Waco, TX (United States)
• OSTI ID: 5732465
• Country of Publication: United States
• Language: English

Related Subjects

664300* -- Atomic & Molecular Physics-- Collision Phenomena-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
ARGON
AUGER EFFECT
CATIONS
CHALCOGENIDES
CHARGED PARTICLES
CHLORINATED ALIPHATIC HYDROCARBONS
CHLORINE
COLLISIONS
CROSS SECTIONS
ELEMENTS
ENERGY RANGE
ENERGY-LEVEL TRANSITIONS
FLUIDS
GASES
HALOGENATED ALIPHATIC HYDROCARBONS
HALOGENS
HYDRIDES
HYDROGEN COMPOUNDS
HYDROGEN IONS
HYDROGEN IONS 1 PLUS
ION COLLISIONS
ION-MOLECULE COLLISIONS
IONIZATION
IONS
METHYL CHLORIDE
MEV RANGE
MEV RANGE 01-10
MOLECULAR IONS
MOLECULE COLLISIONS
NONMETALS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHOSPHORUS
PHOSPHORUS COMPOUNDS
PHOSPHORUS HYDRIDES
RARE GASES
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SULFUR
SULFUR COMPOUNDS
SULFUR DIOXIDE
SULFUR OXIDES