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Plasma synthesis and characterization of ultrafine SiC

Conference ·
OSTI ID:5728161

Ultrafine SiC powders have been prepared by gas phase synthesis from silane and methane in an argon thermal rf-plasma. Bulk properties of the powders were determined by elemental analysis, x-ray diffractin, helium pycnometry, and BET surface area measurements. The near-surface composition and structure of the particles were examined by x-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). In addition to free silicon and carbon particles in the powders, free carbon and various silicon/carbon/oxygen species were found on the surface of the SiC particles.

Research Organization:
Los Alamos National Lab., NM (USA)
DOE Contract Number:
W-7405-ENG-36
OSTI ID:
5728161
Report Number(s):
LA-UR-86-2130; CONF-860883-1; ON: DE86012403
Country of Publication:
United States
Language:
English