Preparation and characterization of MoC/sub x/ thin films

Journal Article · Sun Nov 01 04:00:00 EST 1987 · J. Low Temp. Phys.; (United States)

DOI:https://doi.org/10.1007/BF00682660· OSTI ID:5680607

Haase, E L

Stoichiometric MoC has been calculated to have a T/sub c/ of 16 K. To check this prediction, thin films of MoC/sub x/ were prepared by sputtering both reactively with CH/sub 4/ and using a composite Mo-C target. The preparation conditions were varied over wide ranges of composition, substrate temperature, Ar pressure, and bias voltage. The single-phase B1 structure is formed for substrate temperatures between -100 and 1100/sup 0/C with T/sub c/ values up to 12 K. The T/sub c/ rises with increasing lattice parameter a/sub 0/. While films down to about 38 at % C were made, it was not possible to prepare samples with more than about 41 at % C in the B1 phase by this nonequilibrium technique. A linear extrapolation of the T/sub c/ versus a/sub 0/ plot yields a T/sub c/ value of about 26 K and an a/sub 0/ value of about 0.434 nm for stoichiometric composition. The temperature-dependent specific resistivity is discussed.

• Research Organization: Institut fuer Nukleare Festkorperphysik, Karlsruhe, Germany, F.R.
• OSTI ID: 5680607
• Journal Information: J. Low Temp. Phys.; (United States), Journal Name: J. Low Temp. Phys.; (United States) Vol. 69:3-4; ISSN JLTPA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKANES
ANNEALING
CARBIDES
CARBON COMPOUNDS
DEPOSITION
DIAGRAMS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FILMS
HEAT TREATMENTS
HYDROCARBONS
LATTICE PARAMETERS
MATERIALS TESTING
METHANE
MOLYBDENUM CARBIDES
MOLYBDENUM COMPOUNDS
ORGANIC COMPOUNDS
PHASE DIAGRAMS
PHYSICAL PROPERTIES
PLASMA ARC SPRAYING
REFRACTORY METAL COMPOUNDS
SAMPLE PREPARATION
SPRAY COATING
SPUTTERING
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE COATING
TEMPERATURE DEPENDENCE
TESTING
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VERY LOW TEMPERATURE