Ex situ Ohmic contacts on thin film YBa sub 2 Cu sub 3 O sub 7 minus x

Journal Article · Sat Jun 01 04:00:00 EDT 1991 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.347485· OSTI ID:5679928

Pendrick, V; Brown, R; Matey, J R ^[1]; Findikoglu, A; Xi, X X; Venkatesan, T ^[2]; Inam, A ^[3]

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1. David Sarnoff Research Center, Princeton, New Jersey 08543 (USA)
2. Department of Physics and Astronomy, University of Maryland, College Park, Maryland 20742 (USA)
3. Bellcore, Redbank, New Jersey 07701 (USA)

We report on {ital ex} {ital situ} fabrication of gold contacts onto patterned YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} films. Gold seed layers were blanket sputtered onto photoresist defined over the patterned films. In a second photo process, openings were aligned to the original pads and 8-{mu}m-thick contacts were electroplated. The two layers of photoresist and sputtered gold were removed leaving defined contacts. We obtained specific contact resistance of 2.6{times}10{sup {minus}7} {Omega} cm{sup 2} on post-annealed samples at 79 K. Microwave filters with contacts showed 4.2 dB loss at 9 GHz and 77 K, while comparable filters in copper showed 18 dB loss.

• OSTI ID: 5679928
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:11; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

426001* -- Engineering-- Superconducting Devices & Circuits-- (1990-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
GOLD
HIGH-TC SUPERCONDUCTORS
METALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES