Gas discharge laser having a buffer gas of neon
Patent
·
OSTI ID:5679850
The output power and efficiency of a gas discharge laser is substantially improved by the substitution of neon (Ne) for helium (He) as a buffer in the lasing medium. One embodiment of the invention is a pulsed excimer laser having a lasing gas comprising a mixture of krypton (Kr) and fluorine (F/sub 2/). Use of Ne with the KrF excimer lasing medium further enables advantageous utilization of corona wire pre-ionization to initiate the main discharge of this type of laser.
- Assignee:
- GTE Sylvania Inc.
- Patent Number(s):
- US 4393505
- OSTI ID:
- 5679850
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
BUFFERS
CORONA DISCHARGES
DESIGN
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRON TUBES
ELEMENTS
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
GAS DISCHARGE TUBES
GAS LASERS
GASES
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
NEON
NONMETALS
POWER
PULSES
RARE GAS COMPOUNDS
RARE GASES
420300* -- Engineering-- Lasers-- (-1989)
BUFFERS
CORONA DISCHARGES
DESIGN
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRON TUBES
ELEMENTS
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
GAS DISCHARGE TUBES
GAS LASERS
GASES
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
NEON
NONMETALS
POWER
PULSES
RARE GAS COMPOUNDS
RARE GASES