Vertical-cavity surface emitting lasers: Moving from research to manufacturing

Journal Article · Fri Oct 31 23:00:00 EST 1997 · Proceedings of the IEEE

DOI:https://doi.org/10.1109/5.649649· OSTI ID:566556

Choquette, K D; Hou, H Q ^[1]

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1. Sandia National Labs., Albuquerque, NM (United States). Center for Compound Semiconductor Science and Technology

After more than a decade of research, vertical-cavity surface emitting lasers (VCSELs) are making the transition into the manufacturing arena. The authors review unique VCSEL properties found in their structure, growth, fabrication, and performance, which have precipitated their commercial acceptance. The short optical cavity that is formed between two distributed Bragg reflector mirrors is a distinctive VCSEL attribute. The spectral alignment between the resonance of the optical cavity formed by these mirrors and the laser gain bandwidth is shown to influence the VCSEL performance. Thus, epitaxial VCSEL growth by metalorganic vapor-phase epitaxy aided by in situ reflectance monitoring is discussed with an emphasis on uniformity and reproducibility. They also describe the fabrication techniques and VCSEL structures used to obtain transverse electrical and optical confinement, including etched air-post, ion-implanted, and selectively oxidized VCSELs. For the latter, wet oxidation of AlGaAs to form buried-oxide apertures has enabled record laser performance, such as ultralow threshold current and high efficiency. Numerous applications for VCSELs have been identified that leverage their manufacturing and performance advantages.

• Research Organization: Sandia National Laboratory
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 566556
• Journal Information: Proceedings of the IEEE, Journal Name: Proceedings of the IEEE Journal Issue: 11 Vol. 85; ISSN IEEPAD; ISSN 0018-9219
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
42 ENGINEERING
FABRICATION
LASER CAVITIES
MANUFACTURING
SEMICONDUCTOR LASERS
USES
VAPOR PHASE EPITAXY