X-ray generation in cryogenic targets irradiated by 1 {mu}m pulse laser

Journal Article · Thu Jan 01 04:00:00 EST 1998 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.120708· OSTI ID:565586

Shimoura, A; Amano, S; Miyamoto, S; Mochizuki, T ^[1]

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1. Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, Shosha2167, Himeji, Hyogo671-22 (Japan)

Soft x-ray spectral radiations from Xe, H{sub 2}O, and CO{sub 2} cryogenic targets irradiated by a 1 {mu}m neodymium doped YAG-slab laser at pulse widths of 12{endash}20 ns and at laser intensities of 5{times}10{sup 10}{endash}10{sup 12}W/cm{sup 2} have been observed. These targets radiate soft x-rays in a wavelength range of 10{endash}13 nm which is useful for projection microlithography. We have found a strong x-ray spectral peak at {lambda}=10.8nm with a Xe cryogenic target. The measured x-ray conversion efficiency with the Xe target was 0.8{percent}/sr({lambda}=10.8{plus_minus}0.27nm) at a laser intensity of 1{times}10{sup 12}W/cm{sup 2}. This was ten times or more efficient than that with H{sub 2}O and CO{sub 2} targets. {copyright} {ital 1998 American Institute of Physics.}

• OSTI ID: 565586
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 2 Vol. 72; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
CARBON COMPOUNDS
CARBON DIOXIDE
CRYOGENICS
ICE
LASER-PRODUCED PLASMA
NEODYMIUM LASERS
SOFT X RADIATION
WATER
X-RAY SOURCES
XENON