The project of using a compact SR source at the Siberian microelectronic center

Journal Article · Wed Jan 01 00:00:00 EST 1992 · Review of Scientific Instruments; (United States)

DOI:https://doi.org/10.1063/1.1142659· OSTI ID:5645854

Sinyukov, M P; Makarov, O A ^[1]

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1. Institute of Semiconductor Physics, 630090 Novosibirsk (USSR)

The project for the x-ray lithography facility using a compact storage ring SIBERIA-AS is considered. The SR source with 600-MeV electron energy and an orbit circumference of about 3 m has an ironless superconducting azimuthally symmetrical magnet. It allows us to install up to 15 SR beam lines. The scope of the project is further development of x-ray lithography, and new technologies in this area for development of scientific research: vacuum ultraviolet spectroscopy, photoinduced etching, photoelectron spectroscopy, and radiometry.

• OSTI ID: 5645854
• Journal Information: Review of Scientific Instruments; (United States), Vol. 63:1; ISSN 0034-6748
• Country of Publication: United States
• Language: English

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