Prototype vacuum chamber for compact SR ring

Conference · Fri Sep 30 04:00:00 EDT 1988 · AIP Conf. Proc.; (United States)

OSTI ID:7082859

Yasumitsu, N

A 650 MeV compact (3.14 m in circumference) superconducting electron storage ring is being developed as a synchrotron radiation light source for X-ray lithography. The vacuum system is designed to maintain a beam-on operating pressure of 1 x 10/sup -9/ Torr or less. This system has unique features. A prototype vacuum chamber has been fabricated and tested for evaluation of the vacuum system. A base pressure of 2.6 x 10/sup 10/ Torr (nitrogen equivalent) has been achieved. The pumping speed of the cryopump built into the chamber has been measured at 12000--17000 1/s for hydrogen gas. These results have confirmed to feasibility of this vacuum system for the SR ring.

• Research Organization: SHI Accelerator Research Group Synchrotron Radiation Technology Dept., Sumitomo Heavy Industries, Ltd. 2--1--1 Yato-cho, Tanashi-city, Tokyo, 188 Japan
• OSTI ID: 7082859
• Report Number(s): CONF-880552-
• Conference Information: Journal Name: AIP Conf. Proc.; (United States) Journal Volume: 171:1
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430400* -- Particle Accelerators-- Storage Rings
BEAMS
CAVITY RESONATORS
CRYOPUMPS
DATA
DESIGN
DIAGRAMS
ELECTRON BEAMS
ELECTRONIC EQUIPMENT
ENGINEERING DRAWINGS
EQUIPMENT
EXPERIMENTAL DATA
INFORMATION
LABORATORY EQUIPMENT
LEPTON BEAMS
NUMERICAL DATA
PARTICLE BEAMS
PUMPS
RADIATION SOURCES
RESONATORS
STORAGE RINGS
SUPERCONDUCTING CAVITY RESONATORS
SUPERCONDUCTING DEVICES
SYNCHROTRON RADIATION SOURCES
ULTRAHIGH VACUUM
VACUUM PUMPS
VACUUM SYSTEMS